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10.11.2018 Influence of electrical modes on radiation sensitivity of hydrogen sensors based on Pd-Ta2O5-SiO2-Si structures.
The influence of the circuit’s electric modes on the radiation sensitivity of hydrogen sensors based on the metal-insulator-semiconductor field-effect transistor with structure Pd-Ta2O5-SiO2-Si (MISFET) was researched. There were measured the hydrogen responses of output voltages V of the MISFET-based circuits at different gate voltages before and after electron irradiations. The voltages V as functions of hydrogen concentration C were determined for different ionizing doses D. Models of influence of the electric modes on the radiation sensitivity of sensors were based on experimental dependencies of V(C, D). The recommendations for the optimal choice of MISFET-based circuit’s electric modes were formulated.5 viewes